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The Science and Engineering of Microelectronic Fabrication
This book provides a comprehensive introduction to the science and engineering principles behind modern microelectronic fabrication. It explains the physical and chemical processes used in semiconductor manufacturing, including lithography, oxidation, etching, doping, and thin-film deposition. The book is widely used in electrical engineering and semiconductor technology courses.
- Edition
- 2nd Edition
- ISBN/ISSN
- 0-19-513605-5
- Collation
- 431 pages : illustrations ; 24 cm
- Series Title
- -
- Call Number
- 621.38152 C187
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