BOOK

Semiconductor device and failure analysis using photon emission microscopy

---

This book describes how photon emission microscopy (PEM) is used as a physical fault‑localization technique to analyze failures in semiconductor integrated circuits. It covers the principles of PEM instrumentation, key operation modes, and applications to reliability issues such as hot‑carrier and oxide degradation in MOS devices, making it a practical reference for engineers and researchers in device analysis.

---

Availability

Detail Information

Series Title

-

Call Number

621.38152 C539

Publisher

USA : Wiley & Sons., 2000

Collation

-

Language

English

ISBN/ISSN

978‑0471492405

Classification

NONE

Content Type

-

Media Type

unmediated

Carrier Type

-

Edition

-

Subject(s)

-

Specific Detail Info

-

Statement of Responsibility

-

Other version/related

File Attachment

Comments

---

You must be logged in to post a comment