The Science and Engineering of Microelectronic Fabrication | Salahaddin University eLibrary (SULIB)

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The Science and Engineering of Microelectronic Fabrication

Stephen A. Campbell - Personal Name;

This book provides a comprehensive introduction to the science and engineering principles behind modern microelectronic fabrication. It explains the physical and chemical processes used in semiconductor manufacturing, including lithography, oxidation, etching, doping, and thin-film deposition. The book is widely used in electrical engineering and semiconductor technology courses.

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College of Education 621.38152 C187

621.38152C1871

Available - item_status_name

Detail Information

Series Title: -
Call Number: 621.38152 C187
Publisher: New York, USA : Oxford University Press., 2001
Collation: 431 pages : illustrations ; 24 cm
Language: English
ISBN/ISSN: 0-19-513605-5
Classification: 621.38152
Content Type: text
Media Type: unmediated
Carrier Type: volume
Edition: 2nd Edition
Subject(s): Microelectronics fabrication Semiconductor device
Specific Detail Info: Textbook covering semiconductor manufacturing processes including oxidation, diffusion, ion implantation, lithography, etching, thin film deposition, and integrated circuit fabrication technology.
Statement of Responsibility: by Stephen A. Campbell

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